Fur "xoogga dhagaxa" ee ka dambeeya wax soo saarka semiconductor - Sidee qaybaha saxda ah ee granite dib ugu qaabayn karaan xadka saxda ah ee wax soo saarka jajabka

Kacaankii Saxda ahaa ee wax soo saarka semiconductor-ka: Marka granite uu la kulmo tiknoolajiyada micron
1.1 Daah-fur aan la filayn oo ku saabsan cilmiga agabka
Sida ku cad warbixinta Ururka Semiconductor-ka Caalamiga ah ee SEMI 2023, 63% ka mid ah warshadaha casriga ah ee adduunka ayaa bilaabay inay isticmaalaan saldhigyada granite halkii ay ka isticmaali lahaayeen goobaha birta dhaqameed. Dhagaxan dabiiciga ah, oo ka soo jeeda qoyaanka magma ee dhulka hoostiisa ah, ayaa dib u qoraya taariikhda wax soo saarka semiconductor-ka sababtoo ah sifooyinkiisa gaarka ah ee jireed:

Faa'iidada firfircoonida kulaylka: isku-darka ballaarinta kulaylka ee granite 4.5×10⁻⁶/℃ waa 1/5 oo keliya oo ka mid ah birta aan miridhku lahayn, xasilloonida cabbirka ±0.001mmna waxaa lagu ilaaliyaa shaqada joogtada ah ee mashiinka lithography.

Astaamaha damiyaha gariirka: isku-darka is-jiidjiidka gudaha waa 15 jeer ka sarreeya kan birta la shubay, taasoo si wax ku ool ah u nuugta qalabka gariirka yar-yar

Dabeecadda birlabeynta eber: gebi ahaanba meesha ka saar qaladka birlabka ee cabbirka laysarka

1.2 Safarka isbeddelka ka yimid aniga ilaa aniga oo ah qof cajiib ah
Tusaale ahaan, iyadoo la adeegsanayo saldhigga wax soo saarka caqliga leh ee ZHHIMG ee Shandong, gabal granite cayriin ah ayaa loo baahan yahay in la mariyo:

Mashiinka aadka u saxsan: xarunta mashiinka isku xirka shan-dhidibka ah muddo 200 saacadood ah oo shiidi joogto ah, qallafsanaanta dusha sare ilaa Ra0.008μm

Daawaynta gabowga macmal ah: 48 saacadood oo sii dayn walaac dabiici ah oo ku jirta aqoon-is-weydaarsiga heerkulka iyo qoyaanka joogtada ah, kaas oo hagaajiya xasilloonida badeecada 40%
Marka labaad, kala fur lixda dhibaato ee saxda ah ee wax soo saarka semiconductor-ka "xalka dhagaxa"
2.1 Nidaamka dhimista heerka kala-soocidda Wafer-ka

Tusmada kiiska: Ka dib markii warshad sameysa jajabka laga sameeyay Jarmalka ay qaadatay goobteena granite-ka ee gaaska sabbaynaya:

Dhexroorka Wafer-ka	Hoos u dhigista heerka jajabka	horumarinta fidsanaanta
12 inji	67%	≤0.001mm
18 inji	82%	≤0.0005mm

2.2 Nidaamka horumar ee saxnaanta isku-xidhka Lithographic

Nidaamka magdhowga heerkulka: dareemaha dhoobada ah ee ku dhex jira ayaa la socda isbeddelka qaabka waqtiga dhabta ah wuxuuna si toos ah u hagaajiyaa jihada madal
Xogta la cabbiray: hoos u dhaca 28℃ ± 5℃, saxnaanta ku-xidhka way isbeddeshaa wax ka yar 0.12μm