Decrypt "xoogga dhagaxa" ee ka dambeeya wax soo saarka semiconductor - Sidee qaybaha saxda ah ee granite dib u qaabayn karaan xadka saxda ah ee soosaarka chip

Kacaanka saxda ah ee wax soo saarka semiconductor: Marka granite la kulmo tignoolajiyada micron
1.1 Helitaanka lama filaanka ah ee sayniska qalabka
Marka loo eego warbixinta 2023 SEMI International Semiconductor Association, 63% dharka casriga ah ee dunidu waxay bilaabeen inay isticmaalaan saldhigyada granite halkii ay ka isticmaali lahaayeen biraha dhaqameed. Dhagaxan dabiiciga ah, kaas oo ka soo jeeda magma uumiga qoto dheer ee Dhulka, ayaa dib u qoraya taariikhda wax soo saarka semiconductor sababtoo ah sifooyinka jireed ee gaarka ah:

Faa'iidada inertia kulaylka: isugeynta ballaarinta kulaylka ee granite 4.5 × 10⁻⁶ / ℃ waa 1/5 oo keliya tan birta ah, iyo xasilloonida cabbirka ± 0.001mm waxaa lagu hayaa shaqada joogtada ah ee mashiinka lithography

Astaamaha qoyaanka gariirka: iskudarka is-jiidhka gudaha ayaa 15 jeer ka sarreeya kan birta shubka ah, isagoo si wax ku ool ah u nuugaya qalabka gariir-yar.

Dabeecada magnetization Zero: si buuxda u baabi'in qaladka magnetic ee cabbirka laysarka

1.2 Safarka metamorphosis ee kayga ilaa fab
Qaadashada tusaale ahaan saldhigga wax-soo-saarka garaadka ee ZHHIMG ee Shandong, qayb ka mid ah granite ceyriin ayaa u baahan in la maro:

Mashiinka saxda ah ee saxda ah: Xarunta mashiinka isku xirka shan-dhidibka 200 saacadood oo wax-shiid joogto ah, qallafsanaanta dusha sare ilaa Ra0.008μm

Daaweynta gabowga macmalka ah: 48 saacadood oo kadeedka dabiiciga ah ee lagu sii daayo siminaarka heerkulka joogtada ah iyo qoyaanka, kaas oo hagaajinaya xasilloonida alaabta 40%
Marka labaad, dil lix dhibaato oo sax ah ee wax soo saarka semiconductor "xalka dhagaxa"
2.1 Nidaamka dhimista heerka kala goynta wafer

Mudaaharaad kiis: Ka dib dhisme jajab ah oo ku yaal Jarmalka ayaa qaatay gaaskayaga sabbaynaya madal granite:

dhexroorka wafer	dhimista heerka chip	hagaajinta flatness
12 inji	67%	≤0.001mm
18 inji	82%	≤0.0005mm

2.2 nidaamka horumarka saxnaanta toosinta lithographic

Nidaamka magdhowga heerkulka: dareeraha dhoobada ku dhex jira ayaa kormeeraya doorsoomiyaha qaabka wakhtiga dhabta ah oo si toos ah u hagaajiya rabitaanka goobta
Xogta la cabbiray: marka la eego isbedbedelka 28℃±5℃, saxnaanta ku darida ayaa isbedbedesha in ka yar 0.12μm